NFPA 318-2018 PDF Download
Standard EN SampleStandard for the Protection of Semiconductor Fabrication Facilities
Also Known As:
The NFPA 318-2018 standard is a set of guidelines aimed at improving chemical safety and emergency response in semiconductor fabrication facilities. The standard has been reorganized and includes major revisions to the requirements for gas-detection systems and smoke detection systems.
The standard applies to semiconductor fabrication facilities and research and development areas where hazardous chemicals are used, stored, and handled, and where cleanrooms or clean zones are present. It covers a wide range of safety aspects, including general safety precautions, fire protection, construction, chemical storage and handling, hazardous gas cylinder storage and distribution, bulk silane systems, production and support equipment, emergency control station, and means of egress.
The 2018 edition of NFPA 318 is designed to assist various stakeholders involved in fire protection, including engineers, authorities having jurisdiction (AHJs), facility personnel, and contractors. It provides technical modifications and revisions for clarity in requirements for gas-detection systems and smoke detection systems. The standard clarifies when gas detection is necessary and where it should be physically provided. It also includes requirements for detector capabilities, coverage areas, alert and alarm sensitivities, and maximum transport times based on research conducted by the Fire Protection Research Foundation and taken from NFPA 76.
Language(s) | English |
File Size | 378.9 KB |