JIS B 9920-2:2019 PDF Download

JIS B 9920-2:2019 is a standard that focuses on monitoring the performance of cleanrooms and controlled environments to ensure air cleanliness by particle concentration. It outlines the minimum requirements for a monitoring plan that measures and assesses airborne particle concentration in order to provide evidence of cleanroom performance.

However, it is important to note that this standard does not cover the monitoring of other aspects such as vibration or general maintenance of engineering systems. It specifically addresses the monitoring of particle concentration within the specified range of 0.1 µm to 5 µm, excluding ultrafine particles smaller than 0.1 µm.

This standard is aligned with the International Standard ISO 14644-2:2015, which shares similar objectives and guidelines in ensuring cleanroom performance related to air cleanliness by particle concentration.