ISO 14644-9:2022 PDF Download

ISO 14644-9:2022 Standard provides a procedure for evaluating the levels of particle cleanliness on solid surfaces within cleanrooms and controlled environments. The standard includes recommendations for testing and measuring methods, as well as information on surface characteristics.

This standard applies to all solid surfaces found in cleanrooms and associated controlled environments, including walls, ceilings, floors, working environments, tools, equipment, and products. The assessment of surface cleanliness is specifically focused on particles ranging from 0.05 µm to 500 µm in size.

However, there are certain aspects that are not covered in this standard. This includes requirements for surface cleanliness and suitability for specific processes, procedures for surface cleaning, material characteristics, interactive bonding forces or generation processes, statistical methods for assessment and testing, and other particle characteristics, such as electrostatic charge, ionic charges, and microbiological state.