CGA G-13-2006 PDF Download

The CGA G-13-2006 standard provides guidelines and recommendations for the safe storage and handling of silane and silane mixtures. The standard is targeted towards silane manufacturers, suppliers, and end users, especially those in the semiconductor industry.

The publication covers various aspects of silane storage and handling, including cylinder and bulk delivery systems. It offers practical methods for storage and handling at user sites and provides guidelines for interconnecting piping systems up to the distribution piping within manufacturing facilities.

The standard also includes recommendations for setback distances, which are determined based on factors such as heat radiation and blast effects caused by delayed ignition. These recommendations help ensure the safety of personnel and facilities.

It is important to note that the standard does not address silane usage and handling within clean room areas. However, the technical content of the standard is based on experimental testing conducted by trusted organizations such as CGA, Factory Mutual, and SEMATECH, ensuring its reliability and relevance.